Main Equipments
Nano Litho Pattern Line
- Supporting the demand of nano patterning(Class 1, NIST-A Zone)
- Supporting the process of mask stage by stage
Category | Equipment | Model(Maker) |
---|---|---|
Photo | E-beam lithography I (9300) | JBX9300FS(JEOL) |
E-beam lithography II (6000) | JBX6000FS/E(JEOL) | |
KrF Stepper | PAS5500/300C(ASML) | |
Mask Aligner(Auto) | MA150e(Karl suss) | |
Mask Aligner I (R&D) | EVG620(EVG) | |
E-beam curing machine | ElctronCure 30TMx | |
Measurement/Analysis | AFM I | XE150(PSIA) |
FE SEM I | S-4800(Hitachi) |
Nano R&D Support Line
- Supporitng R&D of nano electronic & photonic devices
- Supporting the basic research and aplications
Category | Equipment | Model(Maker) |
---|---|---|
Etch | ICP etcher I(R&D) | Multiplex ICP(STS) |
ICP etcher IV(R&D) | ICP 380(Oxford System) | |
Thin Film | E-beam evaporator II(R&D) | UEE(ULTECH) |
RTA(R&&D) | RTA150H-SVP1(NYM TECH) | |
PE(HDP)-CVD(R&D) | High-DEP(BMR) | |
Sputter(R&D) | SPS series(ULTECH) | |
MOCVD | AIX200/4RF(ALXTRON) | |
Wet Cleaning | R&D Wet-station II | Designed for KANC(ATIS) |
Nano Device Process Intergration Line
- Producing the nano electronic devices focus on 6" compound semiconductor
- Business oriented pilot scale production and Foundry service
Category | Equipment | Model(Maker) |
---|---|---|
Thin Film | E-beam evaporator I (foundry) | EI-5(ULVAC) |
PECVD II (foundry) | VL-LA-PECVD(Unaxis) | |
Microwave asher (foundry) | Enviro II(ULVAC) | |
Sputter(Cluster) (foundry) | SME-200J(ULVAC) | |
Au Plating Machine I & II | SWP-C3D(Sungwon Forming) | |
Liftoff Machine | VL-6020(M.SETEK) | |
Spin Etcher | VE-8200(M.SETEK) | |
Etch | ICP etcher II(foundry) | VL-ICP(Unaxis) |
RIE(foundry) | VL-PHF-RIE(Unaxis) |
Measurement & Analysis Lab
- Evaluating characteristics of nanomaterials and products
- Supporting nano structure & surface analysis, Testing samples
Category | Equipment | Model(Maker) |
---|---|---|
Measurement/Analysis | AFM II | XE100(PSIA) |
AFM III | XE100(PSIA) | |
FE SEM II | S-4300SE(Hitachi) | |
PL mapper | RPM2000(Accent) | |
Hall Measurement | HL5500PC(Accent) | |
Doping profiler | ECVpro(Accent) | |
FT-IR | Nicolet5700(Thermo electron corp.) | |
XRD | D8 DISCOVER(Bruker) | |
CL | MONO CL3(GATAN) | |
Spectro Photometer | Cary5000(Varian) |